Essential Materials for Semiconductor Manufacturing

Welcome to Matheson Tri-Gas semiconductor products! Our mission is to deliver the highest degree of safety, quality and technology in the materials you need for any semiconductor manufacturing process. We are at your disposal to provide you with whatever you will need: if not listed in these pages, please drop us a note (Link 5) and we will let you know how we can help. Thank you in advance for visiting our pages.

Semiconductor Pure Gases • Ammonia • Argon • Arsine • Boron Trichloride • Boron Trifluoride • Carbon Dioxide • Carbon Monoxide • Chlorine • Deuterium • Dichlorosilane • Disilane • Germane • Halocarbon 116 (Hexafluoroethane) • Halocarbon 1216 (Hexafluoropropylene) • Halocarbon 14 (Tetrafluoromethane) • Halocarbon 218 (Perfluoropropane) • Halocarbon 23 (Trifluoromethane) • Halocarbon 32 (Difluoromethane) • Halocarbon 41 (Methyl Fluoride) • Halocarbon 4110 (Octafluorocyclopentene) • Halocarbon C318 (Octafluorocyclobutane) • Helium • Hydrogen • Hydrogen Bromide • Hydrogen Chloride • Hydrogen Fluoride • Krypton • Methane • Methylsilane • Neon • Nitric Oxide • Nitrogen • Nitrogen Trifluoride • Nitrous Oxide • Oxygen • Phosphine • Propylene • Silane • Silcore • Silicon Tetrachloride • Silicon Tetrafluoride • Sulfur Hexafluoride • Trichlorosilane • Tungsten Hexafluoride • Xenon Semiconductor Gas Mixtures • General Information • Arsine • Diborane • Phosphine • Silane Safe Delivery Gas Sources • Arsenic Pentafluoride SDS2® • Arsine SDS2® • Enriched Boron Trifluoride SDS2® • Germanium Tetrafluoride SDS2® • Enriched 72 Germanium Tetrafluoride SDS2® • Hydrogen Selenide SDS2® • Phosphine SDS2® • Phosphorus Trifluoride SDS2® • Silicon Tetrafluoride SDS2® • Arsine, Phosphine, Boron Trifluoride SDS3® Hydride Gas Sources • Safe High Capacity Storage Boron Trifluoride Gas Sources • Natural Abundance BF3 • Isotopically Enriched BF3 • User Guide Compound Semiconductor Gases • The Compound Semiconductor Initiative • Arsine AsH3 ULTIMA 6N5 Purity • Arsine AsH3 ULSI 6N and 5N5 Purity • Arsine AsH3 ULSI 5N7 Purity • Phosphine PH3 ULTIMA 6N Purity • Phosphine PH3 ULSI 5N7 and 5N4 Purity • Ammonia NH3 ULTIMA 6N4 Purity • Ammonia NH3 ULSI 5N5 and 5N Purity