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Trace Gas Analytical
A Modified Thermogravimetric Apparatus of Improved Performance
Absorption behavior of arsine at 1392 nm and the feasibility of water vapor detection using cavity ring-down absorption spectroscopy
Detection and removal of carbonyl sulfide from ultra-high purity arsine for MOCVD
Detection of Trace Water Vapor in High Purity Phosphine using Cavity Ring-down Spectroscopy
Etch Process
Ultratrace detection and control of germane contamination in arsine by GC-ICPMS
Trace water vapor detection in pure arsine gas using quartz crystal oscillator technology
Evaluation of the Performance of Diaphragm Valves in UHP Chlorine Gas
HBr Corrosion Studies of Alloys used in Semiconductor Manufacturing
III-V Compound Semiconductor
Detection and control of oxy-impurities in Group V Hydride gases
Bulk sub-atmospheric pressure hydride sources for MOCVD
Contamination control in gas delivery systems for MOCVD
Review of integrated contamination control for GaAs and InP MOCVD processes
Chamber Clean
Investigation of trace impurities in hydride gases by GC-AED
CVD
Contamination Control in Carbon Monoxide Processes
Delivery Systems
EHS Benefits of using sub-atmospheric pressure hydride gas sources for MOCVD
How Weld Torch Hose Materials Affect Sheilding Gas Quality
Next-Generation CVD Aluminum Precursors Pose New Handling Challenges
Developments in Abatement Technology for MOCVD Processing
Purification
Next-Generation CVD Aluminum Precursors Pose New Handling Challenges
Developments in Abatement Technology for MOCVD Processing
Absorption behavior of arsine at 1392 nm and the feasibility of water vapor detection using cavity ring-down absorption spectroscopy
Bulk sub-atmospheric pressure hydride sources for MOCVD
Abatement
Performance of SAGE hydride gas source for MOCVD

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Matheson Electronics is committed to providing innovative products, services, and technologies developed via internal research, plus collaboration. Combining our world class capabilities in material, chemical, and gas-based solutions with the expertise of leading edge electronics manufacturers and equipment providers will enable compelling developments to overcome the technical challenges of the future.

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