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Technical Articles
Microcontamination and Live Gas Testing
Article Title
Published/Presented
Year
Contamination Control in Carbon Monoxide Processes
Solid State Technology
2002
Corrosion Resistance of Cost Effective Alternative Materials for Semiconductor Gas Distribution Systems
Semicon West 2002
2002
Detection and Control of Oxy-Impurities in Group V hydride Gases and Gas Delivery Systems
Compound Semiconductor Manufacturing Exposition
2001
Dry Down Characterization of Diaphragm
Solid State Technology
2000
UltraHigh Purity Bulk Specialty Gas Package for 300mm Wafer Fabrication
Semicon West 1999
1999
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